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Film Deposition Unit - メーカー・企業と製品の一覧

Film Deposition Unitの製品一覧

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Sputtering film deposition unit

Sputtering film deposition unit

Sputter deposition unit

Sputtering film deposition unit equipped with a magnetron sputtering source and substrate rotation mechanism 【Features】 ○ Achieves excellent film thickness distribution ○ Capable of switching between DC sputtering and RF sputtering ○ Allows deposition of different types of films by incorporating two types of sputtering sources ○ Equipped with reverse sputtering function for substrate cleaning and etching ○ Prevents contamination and dust generation by adopting a two-motion shutter ● For other functions and details, please download the catalog.

  • Vacuum forming machine
  • Hydraulic Equipment
  • Other semiconductor manufacturing equipment
  • Film Deposition Unit

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[Business Introduction] Glass Coating for Building Materials and Mobility

[Business Introduction] Glass Coating for Building Materials and Mobility

Transparent and highly effective! Customized according to your desired configuration and necessary film formation system!

Our company supplies film deposition systems to major glass manufacturers around the world. Building material glass thin films significantly reduce energy consumption, contributing to environmental protection. In this way, solar control films prevent buildings from becoming hot inside during the summer, reducing air conditioning costs. On the other hand, in winter, low-emissivity (Low-E) coatings almost completely prevent heat loss from the glass surface to the outdoors, resulting in minimal heating energy loss. As a result, up to 80% of the energy used for heating and cooling buildings can be saved. 【Other Businesses (Partial)】 ■ Thin-film solar cells ■ Crystalline solar cells ■ Flexible substrates ■ Special applications ■ Modular process systems *For more details, please refer to the PDF materials or feel free to contact us.

  • Glass
  • others
  • Film Deposition Unit

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Business Introduction: Flexible Circuit Boards

Business Introduction: Flexible Circuit Boards

The solar control film for vehicle glass achieves a comfortable interior temperature while simultaneously saving fuel.

Our FOSA and FOBA web coating systems can be customized for various applications, including polymer films with touch contacts for displays, antistatic, anti-reflective, Low-E coated films, and carbon coatings for high-performance lithium-ion batteries. We supply vacuum coating systems for roll-to-roll processes, ranging from small-scale to widths of over 2 meters. This system deposits coatings on various types of substrates such as polymer films, metal foils, and flexible glass, and is used in markets for window films, flexible electronics, and batteries. [Other Businesses (Partial)] ■ Glass coating for building materials and mobility ■ Thin-film solar cells ■ Crystalline solar cells ■ Special applications ■ Modular process systems *For more details, please refer to the PDF materials or feel free to contact us.

  • Glass
  • Film Deposition Unit

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[Business Introduction] Special Applications

[Business Introduction] Special Applications

Special order support team! Providing ideal solutions for large-scale production.

Air transport continues to grow, and accordingly, the demands for reducing fuel consumption, decreasing exhaust emissions, and quieting engines are becoming increasingly significant. Modern turbines must withstand combustion temperatures and temperature fluctuations that are far higher than those of traditional designs. Our TUBA is the appropriate system concept for turbines. Additionally, in the automotive market, electric vehicles benefit from our expertise, PVD processes, and film deposition systems, providing battery and fuel cell manufacturers with cost-effective, ideal solutions for large-scale production. [Other Businesses (Partial)] ■ Glass coating for building materials and mobility ■ Thin-film solar cells ■ Crystalline solar cells ■ Flexible substrates ■ Modular process systems *For more details, please refer to the PDF materials or feel free to contact us.

  • Electron beam lithography equipment
  • Film Deposition Unit

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[Business Introduction] Modular Process System

[Business Introduction] Modular Process System

The system features modular design! It can accommodate long-term changes according to technology and productivity.

Our company has over 50 years of experience in building systems for industrial production and research and development. Leveraging this specialized know-how, we have supplied hundreds of vacuum deposition systems for relatively small substrates to our customers. With our modular systems, we can provide customized solutions for wafer-based products, three-dimensional shaped products, substrates with a deposition width of less than 1,000 mm in batch processes, drum-type deposition devices, cluster-type, or inline systems. 【Other Businesses (Partial)】 ■ Glass deposition for building materials and mobility ■ Thin-film solar cells ■ Crystalline solar cells ■ Flexible substrates ■ Special applications *For more details, please refer to the PDF materials or feel free to contact us.

  • Wafer
  • Film Deposition Unit

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Sublimation material compatible ALD system 'TFALD-201'

Sublimation material compatible ALD system 'TFALD-201'

Detailed customization is possible! Uniform film formation on high aspect ratio three-dimensional structures.

The "TFALD-201" is a research and development ALD system compatible with sublimation materials. It supports the deposition of metal oxides, precious metals, and composite metal films. Additionally, you can select suitable gas supply units according to the pressure of various materials and reaction gases. Furthermore, the material unit and gas supply unit can be added or removed as needed. 【Features】 ■ Compatible with sublimation materials ■ For research and development ■ Supports the deposition of metal oxides, precious metals, and composite metal films ■ Uniform film deposition on high aspect ratio three-dimensional structures ■ Detailed customization is possible *For more details, please refer to the PDF document or feel free to contact us.

  • Other physicochemical equipment
  • Film Deposition Unit

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Film formation system

Film formation system

We provide high productivity film formation systems.

Our company develops and manufactures advanced deposition equipment for forming thin film functional layers on materials such as glass, metal foils, wafers, polymer films, and flexible glass. With many years of experience in the solar cell industry, we provide high productivity deposition systems to the world's leading companies in crystalline and thin-film solar panels. Our deposition contributes to the manufacturing of high-performance, lightweight, and flexible components, which are applied in medical, automotive, lighting, industrial electronics, and home appliances. Please feel free to contact us if you have any inquiries. 【Products】 ■ Large-area deposition system for building materials glass "GC330H" ■ High productivity modular device for glass deposition in solar cells "XENIA" ■ Modular system platform for deposition silicon wafers in the photovoltaic field "XEA|nova(R)", among others *For more details, please download the PDF or feel free to contact us.

  • Wafer processing/polishing equipment
  • Circuit board processing machine
  • others
  • Film Deposition Unit

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【Business Introduction】Crystalline Solar Cells

【Business Introduction】Crystalline Solar Cells

High-efficiency solar cell manufacturing! We accommodate not only standard format wafers but also special format ones.

Based on our experience of installing over 150 deposition systems for manufacturers of crystalline and thin-film solar panels, we have accumulated exceptional process know-how. With our modular XEA|nova wafer deposition system, which can be customized according to customer needs, we have already been widely accepted in the heterojunction technology (HJT) market. We will continue to develop new high-efficiency cell concepts made possible by high productivity and high-precision thin-film deposition technology. 【Other Businesses (Partial)】 ■ Glass deposition for building materials and mobility ■ Thin-film solar cells ■ Flexible substrates ■ Special applications ■ Modular process systems *For more details, please refer to the PDF materials or feel free to contact us.

  • Other electronic parts
  • Film Deposition Unit

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